Presentation Title

Performance of Surface Acoustic Wave Devices as a function of Annealing Temperature

Start Date

November 2016

End Date

November 2016

Location

HUB 302-116

Type of Presentation

Poster

Abstract

Surface acoustic waves (SAWs) are mechanical disturbances propagating on the surface of a media and they play an important role in wireless communication. SAW propagation is associated with dynamic compressive and tensile strain at the surface and can be used to control strain dependent properties of thin films at high frequencies. The deposition of such thin films in some case requires high deposition temperatures and ultra-high vacuum, subjecting SAW devices to these extreme conditions during the thin film growth. Therefore, it is important to understand how SAW devices respond after being exposed to extreme conditions. Here, we have studied the performance of SAW devices on 128° Y-Cut LiNbO3 after high temperature (≥600 °C) annealing in vacuum. LiNbO3 is widely used as a substrate for SAW device fabrication due to its high electromechanical coupling. The SAW devices in our experiment consist of two interdigital transducers (IDT), and both before and after annealing, the performances of our SAW devices are investigated by measuring the SAW signal transmitted from one IDT to the second IDT. Our results show no sign of degradation in SAW device performance when annealed at 600 °C even for duration up to 16 hours, but annealing at 800 °C for 8 hours greatly deteriorates its performance.

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Nov 12th, 1:00 PM Nov 12th, 2:00 PM

Performance of Surface Acoustic Wave Devices as a function of Annealing Temperature

HUB 302-116

Surface acoustic waves (SAWs) are mechanical disturbances propagating on the surface of a media and they play an important role in wireless communication. SAW propagation is associated with dynamic compressive and tensile strain at the surface and can be used to control strain dependent properties of thin films at high frequencies. The deposition of such thin films in some case requires high deposition temperatures and ultra-high vacuum, subjecting SAW devices to these extreme conditions during the thin film growth. Therefore, it is important to understand how SAW devices respond after being exposed to extreme conditions. Here, we have studied the performance of SAW devices on 128° Y-Cut LiNbO3 after high temperature (≥600 °C) annealing in vacuum. LiNbO3 is widely used as a substrate for SAW device fabrication due to its high electromechanical coupling. The SAW devices in our experiment consist of two interdigital transducers (IDT), and both before and after annealing, the performances of our SAW devices are investigated by measuring the SAW signal transmitted from one IDT to the second IDT. Our results show no sign of degradation in SAW device performance when annealed at 600 °C even for duration up to 16 hours, but annealing at 800 °C for 8 hours greatly deteriorates its performance.